Focused-ion-beam-assisted magnet fabrication and manipulation for magnetic field detection applications.

ACS applied materials & interfaces · 2009 · Unclear · Insufficient evidence

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UnclearInsufficient evidencePaper 3337

A focused-ion-beam-assisted milling/deposition technique was used to fabricate reduced-size NdFeB magnets and bond them to a thin-film bulk acoustic resonator (FBAR). Electrical characterization showed a downshift in resonance frequency and a reduction in the…

Study snapshot

PublicationACS applied materials & interfaces · 2009
Study typeengineering
Reported directionUnclear
Evidence ratingInsufficient

Abstract

A focused-ion-beam-assisted technique intended for ultrasmall, hard-magnet fabrication has been developed. By means of ion-beam-induced milling and deposition, reduced-size NdFeB magnets were extracted from a macroscopic quarry and bonded to the surface of a thin-film bulk acoustic resonator (FBAR). Electrical characterization of the FBAR before and after bonding of the magnet was carried out, thus observing both a downshifting of the resonance frequency and a reduction of the quality factor of the resonator. The magnetic behavior of the nanomagnet has been confirmed by means of magnetometry measurements based on atomic force microscopy.

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AI evidence extraction

Structured fields below were generated from the paper’s abstract and metadata to make the evidence easier to inspect. Automated extraction may be incomplete or incorrect; verify important details against the original paper.

Study typeengineering
Effect directionunclear
PopulationNot supplied
Sample sizeNot supplied
ExposureNot supplied
Evidence strengthInsufficientConfidence: 74% · Peer reviewed: yes

Main findings

A focused-ion-beam-assisted milling/deposition technique was used to fabricate reduced-size NdFeB magnets and bond them to a thin-film bulk acoustic resonator (FBAR). Electrical characterization showed a downshift in resonance frequency and a reduction in the resonator quality factor after magnet bonding; magnetic behavior was confirmed using AFM-based magnetometry.

Outcomes measured

  • FBAR resonance frequency shift after bonding NdFeB nanomagnet
  • FBAR quality factor change after bonding NdFeB nanomagnet
  • Magnetic behavior confirmation via AFM-based magnetometry
View raw extracted JSON
{
  "study_type": "engineering",
  "exposure": {
    "band": null,
    "source": null,
    "frequency_mhz": null,
    "sar_wkg": null,
    "duration": null
  },
  "population": null,
  "sample_size": null,
  "outcomes": [
    "FBAR resonance frequency shift after bonding NdFeB nanomagnet",
    "FBAR quality factor change after bonding NdFeB nanomagnet",
    "Magnetic behavior confirmation via AFM-based magnetometry"
  ],
  "main_findings": "A focused-ion-beam-assisted milling/deposition technique was used to fabricate reduced-size NdFeB magnets and bond them to a thin-film bulk acoustic resonator (FBAR). Electrical characterization showed a downshift in resonance frequency and a reduction in the resonator quality factor after magnet bonding; magnetic behavior was confirmed using AFM-based magnetometry.",
  "effect_direction": "unclear",
  "limitations": [],
  "evidence_strength": "insufficient",
  "confidence": 0.74,
  "peer_reviewed_likely": "yes",
  "keywords": [
    "focused ion beam",
    "NdFeB",
    "nanomagnet",
    "hard magnet fabrication",
    "thin-film bulk acoustic resonator",
    "FBAR",
    "resonance frequency",
    "quality factor",
    "AFM magnetometry"
  ],
  "suggested_hubs": []
}
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AI-extracted fields are generated from the abstract and metadata and may be incomplete or incorrect. This material is for informational purposes and is not medical advice.

Identifiers and source

DOI: 10.1021/am800205d
PubMed: 20355970

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