Influence of discharge parameters on the resultant sputtered crater shapes for a radio frequency glow discharge atomic emission source.

Analytical chemistry · 1996 · Unclear · Insufficient evidence

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UnclearInsufficient evidencePaper 4184

Study snapshot

PublicationAnalytical chemistry · 1996

Study typeengineering

Reported directionUnclear

Evidence ratingInsufficient

Abstract

A parametric study has been conducted on a radio frequency glow discharge atomic emission spectrometry (rf-GD-AES) source to evaluate the sputtering characteristics and resultant crater shapes for both metallic and nonconducting samples. These studies include a determination of how the operating parameters, namely, power and pressure, influence the sputtered crater's depth, the degree of convexity and/or concavity, and the crater bottom roughness. The results imply that many similarities exist between the rf mode of powering and the well-characterized dc powered devices. Some differences are noted, namely, differing crater shapes at low operating pressures and a lesser dependence of crater flatness on the applied voltage, i.e., dc-bias voltage. A new method of quantifying the degree of concavity/convexity is introduced which involves comparison of the calculated (ideal) cross-sectional area to the resultant crater area as measured by a diamond stylus profilometer. The studies indicate that the rf-GD is well suited for depth-resolved analysis under correctly chosen operating conditions, which fortuitously correspond to those used for optimum bulk elemental analyses.

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AI evidence extraction

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Study typeengineering

Effect directionunclear

PopulationNot supplied

Sample sizeNot supplied

ExposureRF

Evidence strengthInsufficientConfidence: 74% · Peer reviewed: yes

Main findings

A parametric study of an rf glow discharge atomic emission spectrometry source found that operating parameters (power and pressure) influence crater depth, convexity/concavity, and bottom roughness for metallic and nonconducting samples. Similarities to dc-powered devices were reported, with differences including differing crater shapes at low pressures and a lesser dependence of crater flatness on applied (dc-bias) voltage. The authors introduce a method to quantify concavity/convexity by comparing an ideal calculated cross-sectional area to the measured crater area, and conclude the rf-GD is well suited for depth-resolved analysis under appropriately chosen conditions.

Outcomes measured

Sputtered crater depth
Crater convexity/concavity
Crater bottom roughness
Dependence of crater shape/flatness on operating parameters (power, pressure, dc-bias voltage)

View raw extracted JSON

{
  "study_type": "engineering",
  "exposure": {
    "band": "RF",
    "source": "radio frequency glow discharge atomic emission spectrometry source",
    "frequency_mhz": null,
    "sar_wkg": null,
    "duration": null
  },
  "population": null,
  "sample_size": null,
  "outcomes": [
    "Sputtered crater depth",
    "Crater convexity/concavity",
    "Crater bottom roughness",
    "Dependence of crater shape/flatness on operating parameters (power, pressure, dc-bias voltage)"
  ],
  "main_findings": "A parametric study of an rf glow discharge atomic emission spectrometry source found that operating parameters (power and pressure) influence crater depth, convexity/concavity, and bottom roughness for metallic and nonconducting samples. Similarities to dc-powered devices were reported, with differences including differing crater shapes at low pressures and a lesser dependence of crater flatness on applied (dc-bias) voltage. The authors introduce a method to quantify concavity/convexity by comparing an ideal calculated cross-sectional area to the measured crater area, and conclude the rf-GD is well suited for depth-resolved analysis under appropriately chosen conditions.",
  "effect_direction": "unclear",
  "limitations": [],
  "evidence_strength": "insufficient",
  "confidence": 0.74,
  "peer_reviewed_likely": "yes",
  "keywords": [
    "radio frequency",
    "glow discharge",
    "atomic emission spectrometry",
    "sputtering",
    "crater shape",
    "power",
    "pressure",
    "dc-bias voltage",
    "profilometer",
    "depth-resolved analysis"
  ],
  "suggested_hubs": []
}

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AI-extracted fields are generated from the abstract and metadata and may be incomplete or incorrect. This material is for informational purposes and is not medical advice.

Identifiers and source

DOI: 10.1021/ac960259t
PubMed: 21619332

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